相似文献/References:
[1]占梦潮,洪俊明,邹璐鲜,等.ASM2D模型的多模式AAO工艺模拟和优化[J].华侨大学学报(自然科学版),2017,38(1):69.[doi:10.11830/ISSN.1000-5013.201701013]
ZHAN Mengchao,HONG Junming,ZOU Luxian,et al.Multi-Mode AAO Process Simulation and Optimization Based on ASM2D Model[J].Journal of Huaqiao University(Natural Science),2017,38(2):69.[doi:10.11830/ISSN.1000-5013.201701013]