[1]崔长彩,杨成,李子清.蓝宝石衬底表面微观缺陷检测与深度估计[J].华侨大学学报(自然科学版),2021,42(5):561-570.[doi:10.11830/ISSN.1000-5013.202104065]
　CUI Changcai,YANG Cheng,LI Ziqing.Detection and Depth Estimation of Microdefects on Sapphire Substrate Surface[J].Journal of Huaqiao University(Natural Science),2021,42(5):561-570.[doi:10.11830/ISSN.1000-5013.202104065]
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蓝宝石衬底表面微观缺陷检测与深度估计()
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《华侨大学学报（自然科学版）》[ISSN:1000-5013/CN:35-1079/N]

卷:
第42卷
期数:
2021年第5期
页码:
561-570
栏目:
出版日期:
2021-09-20

文章信息/Info

Title:
Detection and Depth Estimation of Microdefects on Sapphire Substrate Surface
文章编号:
1000-5013(2021)05-0561-10
作者:
崔长彩;  杨成;  李子清
华侨大学 制造工程研究院, 福建 厦门 361021
Author(s):
CUI Changcai;  YANG Cheng;  LI Ziqing
Institute of Manufacturing Engineering, Huaqiao University, Xiamen 361021, China
关键词:
蓝宝石衬底;  微观缺陷定位;  深度估计;  线阵相机;  白光干涉技术
Keywords:
sapphire substrate;  microdefect localization;  depth estimation;  linear-array camera;  white-light interferometry
分类号:
TN305;TH74
DOI:
10.11830/ISSN.1000-5013.202104065
文献标志码:
A
摘要:
文中将线阵相机扫描技术与垂直扫描白光干涉技术相结合,对蓝宝石衬底表面的微缺陷进行定位和深度评估.首先,利用线阵相机测量设备进行全场扫描,获得全场图像;然后,通过提取质心坐标来检测微缺陷的位置坐标;最后,在白光干涉测量系统中重建微缺陷的三维形貌,识别缺陷类型,提取缺陷深度信息.结果表明:线阵相机测量系统扫描直径为10.16 cm的蓝宝石衬底表面只需10 s左右,而白光干涉测量系统检测一个微缺陷大约需要76 s,检测到的最深缺陷深度为7.09 μm,共发现13个缺陷(10个凹坑和3个裂纹或划痕)并定位在蓝宝石衬底表面.实验结果表明:该方法能准确定位蓝宝石衬底表面的微缺陷并提取其深度.
Abstract:
Using the linear-array camera scanning technology and the vertical-scanning white-light interference technology, the microdefects on sapphire substrate surfaces were located and their depths were assessed. First, the full-field scanning was carried out with linear-array camera measurement equipment to obtain full-field images of the substrate; then, the position coordinates of the microdefects were detected by extracting their centroid coordinates; finally,the three-dimensional morphology of microdefects was reconstructed to identify the type of defects,and extract the defect depth using white-light interferometry system. It takes only about 10 seconds to scan a diameter 10.16 cm sapphire substrate surface by the linear-array camera measurement system. It takes about 76 seconds to detect one microdefect by the white-light interferometry system. The deepest defect was with a depth of 7.09 μm, and a total of 13 defects(10 pits and 3 cracks or scratches)were identified and localized. The experimental results show that the proposed method can accurately locate microdefects and extract their depths on sapphire substrate surfaces.

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备注/Memo

备注/Memo:
收稿日期: 2021-04-09
通信作者: 崔长彩(1972-),女,教授,博士,博士生导师,主要从事光学几何量精密测量技术与仪器、图像分析与处理、智能优化算法与应用等研究.E-mail:cuichc@hqu.edu.cn.
基金项目: 国家自然科学基金资助项目(51575197); 福建省科技计划项目(2018I0012)http://www.hdxb.hqu.edu.cn
更新日期/Last Update: 2021-09-20