参考文献/References:
[1] CANHAM L T. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers [J]. Applied Physics Letters, 1990.1046-1048.
[2] 彭英才, 何宇亮. 硅基纳米材料发光特性的研究进展 [J]. 量子电子学报, 1999(1):1-7.
[3] 秦国刚. 纳米硅/氧化硅体系光致发光机制 [J]. 红外与毫米波学报, 2005(3):165-173.doi:10.3321/j.issn:1001-9014.2005.03.002.
[4] QIN Guo-gang, LI Yu-jie. Photoluminescence mechanism model for oxidized porous silicon and nanoscale-silicon-particle-embedded silicon oxide [J]. Physical Review, 2003.085309.
[5] LIU Yu-zhen, SHI Wang-guan. Study of photoluminescence spectra of Si-rich SiNx films [J]. Materials Letters, 2004.2397-2400.doi:10.1016/j.matlet.2004.02.015.
[6] 王颖, 申德振, 刘益春. 包埋于氮化硅薄膜中的硅团簇的光致发光特性 [J]. 发光学报, 2004(6):705-709.doi:10.3321/j.issn:1000-7032.2004.06.018.
[7] PEI Z, HWANG H L. Formation of silicon nano-dots in luminescent silicon nitride [J]. Applied Sueface Science, 2003, (212-213):760-764.
[8] 许圣华, 辛煜, 宁兆元. ECR-CVD制备的非晶SiOx Ny 薄膜的光致蓝光发射 [J]. 物理学报, 2003(5):1287-1291.doi:10.3321/j.issn:1000-3290.2003.05.047.
[9] MO Chi-mei, ZHANG Li-de, XIE Lun-yi. Luminescence of nanometer-sized amorphous silicon nitride solids [J]. Journal of Applied Physics, 1993, (10):5185-5188.
[10] 纪爱玲, 马利波, 刘徵. 纳米Si-SiOx 和Si-SiNx 复合薄膜的低温制备及其发光特性 [J]. 物理学报, 2004, (11):3118-3822.doi:10.3321/j.issn:1000-3290.2004.11.036.
[11] ARNETT P C, YUN B H. Silicon nitride trap properties as revealed by charge-centroid measurements on MNOS devices [J]. Applied Physics Letters, 1975(3):94-96.doi:10.1063/1.88093.
[12] WANG Y Q, WANG Y G, CAO L. High-efficiency visible photoluminescence from amorphous silicon nanoparticles embedded in silicon nitride [J]. Applied Physics Letters, 2003, (17):3474-3476.
[13] KIM Baek-hyun, CHO Charg-hee, KIM Tae-wook. Photoluminescence of quantum dots in silicon nitride grown by NH3 and SiH4 [J]. Applied Physics Letters, 2005(3):091908-091910.
[14] 董立军, 刘渝珍, 陈大鹏. 富硅氮化硅薄膜的荧光发射 [J]. 发光学报, 2005(3):380-384.doi:10.3321/j.issn:1000-7032.2005.03.019.
[15] 王小波, 刘渝珍, 奎热西. SiH2Cl2-NH3配比对α-SiNx:H薄膜PL峰的影响 [J]. 发光学报, 2005(4):502-505.doi:10.3321/j.issn:1000-7032.2005.04.017.