[1]薛志萍,陆静,毛现艳,等.电泳共沉积法制备金刚石/Al2O3/玻璃复合涂层的工艺[J].华侨大学学报(自然科学版),2024,45(3):303-313.[doi:10.11830/ISSN.1000-5013.202312030]
　XUE Zhiping,LU Jing,MAO Xianyan,et al.Preparation of Diamond/Al2O3/Glass Composite Coating by Electrophoretic Co-Deposition Method[J].Journal of Huaqiao University(Natural Science),2024,45(3):303-313.[doi:10.11830/ISSN.1000-5013.202312030]
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电泳共沉积法制备金刚石/Al2O3/玻璃复合涂层的工艺()
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《华侨大学学报（自然科学版）》[ISSN:1000-5013/CN:35-1079/N]

卷:
第45卷
期数:
2024年第3期
页码:
303-313
栏目:
出版日期:
2024-05-15

文章信息/Info

Title:
Preparation of Diamond/Al2O3/Glass Composite Coating by Electrophoretic Co-Deposition Method
文章编号:
1000-5013(2024)03-0303-11
作者:
薛志萍1; 2; 3;  陆静1; 2; 3;  毛现艳1; 2;  黄身桂1; 2;  郭桦1; 2
1. 华侨大学 制造工程研究院, 福建 厦门 361021;2. 华侨大学 脆性材料产品智能制造技术国家地方联合工程研究中心, 福建 厦门 361021;3. 华侨大学 生物质低碳转化福建省高校重点实验室, 福建 厦门 361021
Author(s):
XUE Zhiping1; 2; 3;  LU Jing1; 2; 3;  MAO Xianyan1; 2; HUANG Shengui1; 2;  GUO Hua1; 2
1. Institute of Manufacturing Engineering, Huaqiao University, Xiamen 361021, China; 2. National and Local Joint Engineering Research Center for Intelligent Manufacturing Technology of Brittle Material Products, Huaqiao University, Xiamen 361021, China; 3. Fujian Provincial Key Laboratory of Biomass Low-Carbon Conversion, Huaqiao University, Xiamen 361021, China
关键词:
金刚石;  电泳共沉积;  复合涂层;  烧结;  抛光盘
Keywords:
diamond;  electrophoretic co-deposition;  composite coating;  sintering;  polishing disc
分类号:
TB332
DOI:
10.11830/ISSN.1000-5013.202312030
文献标志码:
A
摘要:
以304不锈钢为基体,采用电泳共沉积法制备复合涂层,并通过烧结方式实现涂层在基体的固化。研究电泳共沉积过程中不同悬浮液组成、沉积电压、沉积时间和Al3+质量分数等因素对涂层性能的影响,对涂层进行微观结构表征和力学性能测试,并使用该工艺制备抛光盘,用于蓝宝石的抛光。结果表明:当沉积电压为50 V,沉积时间为6 min,添加质量分数为0.10%的Al3+时,可获得光滑、均匀的金刚石/Al2O3/玻璃复合涂层;复合涂层经450 ℃烧结3 h后,表面致密均匀,硬度达521 HV,复合涂层的耐磨性、与基体的结合强度均良好;使用抛光盘对蓝宝石进行抛光,可将表面粗糙度降低90.2%。
Abstract:
Diamond/ Al2O3/glass composite coating was prepared by electrophoretic co-deposition method on 304 stainless steel substrate, and curing of the coating on the substrate was realized through sintering method. The influence of suspension compositions, deposition voltage, deposition time and mass fraction of Al3+ on the coating properties during the electrophoretic co-deposition process was investigated. Microstructure characterization and mechanical property testing of the prepared coating were carried out, and polishing discs were prepared using this process for polishing sapphire substrate. The results showed that smooth and uniform diamond/Al2O3/glass composite coating was obtained when the deposition voltage was 50 V, the deposition time was 6 min and Al3+ with mass fraction of 0.10% was added. The composite coating had a dense and uniform surface with a hardness of 521 HV after being sintered at 450 ℃ for 3 h, it also exhibited excellent abrasion resistance and bond strength with the substrate. The surface roughness of sapphire substrate was reduced by 90.2% after polishing using the prepared polishing discs.

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备注/Memo

备注/Memo:
收稿日期: 2023-12-27
通信作者: 陆静(1981-),女,教授,博士,博士生导师,主要从事半导体晶圆衬底超精密加工、智能制造新型磨抛工具的研究。E-mail:lujing26@hqu.edu.cn。
基金项目: 国家自然科学基金资助项目(51975222, 51835004); 福建省自然科学基金资助项目(2021J06027); 华侨大学先进碳转化技术研究院开放基金(2023年度)https://hdxb.hqu.edu.cn/
更新日期/Last Update: 2024-05-20