[1]海涌杰,易定容,黄彩虹,等.基于物方差动共焦轴向测量引导的显微镜自动对焦方法[J].华侨大学学报(自然科学版),2024,45(1):16-21.[doi:10.11830/ISSN.1000-5013.202311037]
　HAI Yongjie,YI Dingrong,HUANG Caihong,et al.Microscope Automatic Focusing Method Based on Height-Guidance of Object-Side Differential Confocal Axial Measurement[J].Journal of Huaqiao University(Natural Science),2024,45(1):16-21.[doi:10.11830/ISSN.1000-5013.202311037]
点击复制

基于物方差动共焦轴向测量引导的显微镜自动对焦方法()
分享到：

《华侨大学学报（自然科学版）》[ISSN:1000-5013/CN:35-1079/N]

卷:
第45卷
期数:
2024年第1期
页码:
16-21
栏目:
出版日期:
2024-01-11

文章信息/Info

Title:
Microscope Automatic Focusing Method Based on Height-Guidance of Object-Side Differential Confocal Axial Measurement
文章编号:
1000-5013(2024)01-0016-06
作者:
海涌杰1;  易定容1;  黄彩虹2;  袁涛1;  梅小华2
1. 华侨大学 机电及自动化学院, 福建 厦门 361021;2. 华侨大学 信息科学与工程学院, 福建 厦门 361021
Author(s):
HAI Yongjie1;  YI Dingrong1;  HUANG Caihong2;  YUAN Tao1;  MEI Xiaohua2
1. College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, China; 2. College of Information Science and Engineering, Huaqiao University, Xiamen 361021, China
关键词:
自动对焦方法;  轴向测量;  轴向差动共焦;  物方差动;  微观形貌检测
Keywords:
autofocus method;  axial measurement;  axial differential confocal;  object-side differential;  micromorphology detection
分类号:
TP391.7
DOI:
10.11830/ISSN.1000-5013.202311037
文献标志码:
A
摘要:
针对传统自动聚焦方法效率低,难以适应工业产品微观形貌检测高精度、高效率需求的问题,提出一种基于物方差动共焦轴向测量引导的显微镜自动对焦方法(DCAFM)。在获取测量系统中离焦量和轴向光强差之间的标定曲线后,控制运动机构使物镜与样本的轴向距离以等步距的方式采集图像。通过焦前与焦后位置光强差快速确定当前轴向离焦量,控制轴向运动机构,实现快速自动对焦。搭建显微镜自动对焦实验平台,对样品进行测试。实验结果表明:文中方法的图像对焦速度和灵敏度优于DFT,EOG等自动对焦方法,系统的轴向分辨率优于0.4 μm,有效地提高了显微镜的对焦速度和精度。
Abstract:
Aiming at the problem of low efficiency of traditional automatic focusing methods and difficulty in adapting to the high precision and high efficiency of microscopic morphology detection in industrial products, a microscope automatic focusing method based on the height-guidance of object-side differential confocal axial measurement is proposed. After obtaining the calibration curve between the defocus amount and the axial light intensity difference in the measurement system, the motion mechanism is controlled so that the axial distance between the objective lens and the sample is used to collect images at equal steps. The current axial defocus amount is determined quickly through the difference in light intensity between the front and back focus positions, and control the axial movement mechanism to achieve fast autofocus. A microscope autofocus experimental platform is built to test samples. Experimental results show that the image focusing speed and sensitivity of the proposed method are better than that of DFT, EOG and other automatic focusing methods, and the axial solution of the system is better than 0.4 μm, which effectively improves the focusing speed and accuracy of the microscope.

参考文献/References:

[1] DAVE N,TAMBADE V,PANDHARE B,et al.PCB defect detection using image processing and embedded system[J].International Research Journal of Engineering and Technology,2016,3(5):1897-1901.
[2] LIAO Jun,JIANG Shaowei,ZHANG Zibang,et al.Terapixel hyperspectral whole-slide imaging via slit-array detection and projection[J].Journal of Biomedical Optics,2018,23(6):066503.DOI:10.1117/1.JBO.23.6.066503.
[3] SUBBARAO M,SURYA G.Depth from defocus: A spatial domain approach[J].International Journal of Computer Vision,1994,13(3):271-294.DOI:10.1007/BF02028349.
[4] XIONG Yalin,SHAFER S A.Depth from focusing and defocusing[C]//Proceedings of IEEE Conference on Computer Vision and Pattern Recognition.New York:IEEE Press,1993:68-73.DOI:10.1109/CVPR.1993.340977.
[5] 熊锐,顾乃庭,徐洪艳.一种适应多方向灰度梯度变化的自动对焦评价函数[J].激光与光电子学进展,2022,59(4):373-380.DOI:10.3788/LOP202259.0418001.
[6] 李强,刘贤明,韩凯歌,等.基于深度学习的数字病理扫描系统单次曝光自动对焦方法[J].中国科学:信息科学,2021,51(10):1675-1689.DOI:10.1360/SSI-2020-0349.
[7] 周鹏,胡成海,毕超,等.三轴视觉测量系统自动对焦技术[J].红外与激光工程,2021,50(12):443-450.DOI:10.3788/IRLA20210141.
[8] QU Yufu,ZHU Shenyu,ZHANG Ping.A self-adaptive and nonmechanical motion autofocusing system for optical microscopes[J].Microscopy Research and Technique,2016,79(11):1112-1122.DOI:10.1002/jemt.22765.
[9] BIAN Zichao,GUO Chengfei,JIANG Shaowei,et al.Autofocusing technologies for whole slide imaging and automated microscopy[J].Journal of Biophotonics,2020,13(12):e202000227.DOI:10.1002/jbio.202000227.
[10] 高兴宇,伍世荣,萧泽新.一种现代先进成像技术: 共焦显微术[C]//2004全国光学与光电子学学术研讨会、2005全国光学与光电子学学术研讨会、广西光学学会成立20周年年会论文集.桂林:广西光学学会,2005:250-252.
[11] 刘志群.差动并行共聚焦高精度快速三维表面形貌测量方法研究[D].厦门:华侨大学,2020.
[12] TAN Jiubin,LIU Chenguang,LIU Jian,et al.Sinc2 fitting for height extraction in confocal scanning[J].Measurement Science and Technology,IOP Publishing,2015,27(2):025006.DOI:10.1088/0957-0233/27/2/025006.
[13] YUAN Tao,YI Dingrong,YE Yiqing,et al.Differential confocal over range determination method based on information theory[J].Applied Optics,2023,62(8):2073-2077.DOI:10.1364/AO.484018.
[14] 熊锐.基于数字图像处理的显微自动对焦技术研究[D].成都:中国科学院大学(中国科学院光电技术研究所),2021.
[15] 王烨茹.基于数字图像处理的自动对焦方法研究[D].杭州:浙江大学,2018.

备注/Memo

备注/Memo:
收稿日期: 2023-11-27
通信作者: 梅小华(1980-),女,讲师,主要从事智能控制与应用系统的研究。E-mail:forest999@126.com。
基金项目: 国家自然科学基金面上基金资助项目(52375539); 福建省自然科学基金面上基金资助项目(2021J01293); 福建省自然科学基金重点资助项目(2020J02005)https://hdxb.hqu.edu.cn
更新日期/Last Update: 2024-01-20