[1]马钰慧,邱伟彬,苏道军,等.半导体激光器高反膜系参数的模拟仿真分析[J].华侨大学学报(自然科学版),2013,34(6):636-639.[doi:10.11830/ISSN.1000-5013.2013.06.0636]
　MA Yu-hui,QIU Wei-bin,SU Dao-jun,et al.A Simulation Study on the Design Parameters of High-Reflection Coating for Semiconductor Laser[J].Journal of Huaqiao University(Natural Science),2013,34(6):636-639.[doi:10.11830/ISSN.1000-5013.2013.06.0636]
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半导体激光器高反膜系参数的模拟仿真分析()
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《华侨大学学报（自然科学版）》[ISSN:1000-5013/CN:35-1079/N]

卷:
第34卷
期数:
2013年第6期
页码:
636-639
栏目:
出版日期:
2013-11-20

文章信息/Info

Title:
A Simulation Study on the Design Parameters of High-Reflection Coating for Semiconductor Laser
文章编号:
1000-5013(2013)06-0636-04
作者:
马钰慧1;  邱伟彬1;  苏道军1;  王加贤1;  崔碧峰2;  王晓玲2
1. 华侨大学 信息科学与工程学院, 福建 厦门 361021;2. 北京工业大学 北京市重点光电实验室, 北京 100022
Author(s):
MA Yu-hui1;  QIU Wei-bin1;  SU Dao-jun1;  WANG Jia-xian1;  CUI Bi-feng2;  WANG Xiao-ling2
1. College of Information Science and Engineering, Huaqiao University, Xiamen 361021, China; 2. Beijing Municipal Key Optoelectronic Laboratory, Beijing University of Technology, Beijing, 100022
关键词:
半导体激光器;  中心波;  偏移;  高反射膜;  镀膜
Keywords:
semiconductor laser;  center wavelength;  shift;  high-reflection coating;  coating process
分类号:
TU360.2
DOI:
10.11830/ISSN.1000-5013.2013.06.0636
文献标志码:
A
摘要:
分析制备半导体激光器高反膜系中出现的中心波位置偏移和峰值偏移现象,利用TFCalc软件对实验参数进行模拟仿真,得到中心波位置和峰值与膜厚偏差、膜料折射率变化的具体关系.研究结果表明:膜厚变化只能影响中心波的偏移,而不能影响峰值的大小,膜厚增大则中心波红移,膜厚减小则中心波蓝移;折射率变化会影响中心波位置和峰值的大小两个值,但折射率偏差3%已经是较大值,故折射率偏差对中心波位置的影响不会太大.
Abstract:
Problems of center wavelength position shift and peak reflectance variation appeared in high-reflection coating fabrication of semiconductor laser were analyzed and investigated in this paper. Experiment parameters were simulated by using TFCalc software, and the definite relationship between centre wavelength position, the peak reflectance and film thickness error, coating material index change was obtained. The simulation results showed that the film thickness errors influenced the wavelength position rather than the peak reflectance. Increasing film thickness causes the center wavelength red shift, while decreasing film thickness induced the center wavelength blue shift; Index modification of the coating materials affects both the center position and the peak reflectance. Effect of center wavelength position from coating materials index modification in not significant even the index modification is as high as 3%.

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备注/Memo

备注/Memo:
收稿日期: 2012-12-25
通信作者: 王加贤(1955-),男,教授,主要从事光学薄膜的研究.E-mail:wangjx@hqu.edu.cn.
基金项目: 福建省自然科学基金资助项目(2012J0127); 华侨大学高层次引进人才科研启动项目(11Y0299)
更新日期/Last Update: 2013-11-20