[1]曾友华,郭亨群.富纳米硅氮化硅薄膜光致发光机制[J].华侨大学学报(自然科学版),2007,28(2):147-150.[doi:10.3969/j.issn.1000-5013.2007.02.010]
 ZENG You-hua,GUO Heng-qun.Photoluminescence Mechanism of Silicon-Rich Silicon Nitride Thin Films[J].Journal of Huaqiao University(Natural Science),2007,28(2):147-150.[doi:10.3969/j.issn.1000-5013.2007.02.010]
点击复制

富纳米硅氮化硅薄膜光致发光机制()
分享到:

《华侨大学学报(自然科学版)》[ISSN:1000-5013/CN:35-1079/N]

卷:
第28卷
期数:
2007年第2期
页码:
147-150
栏目:
出版日期:
2007-04-20

文章信息/Info

Title:
Photoluminescence Mechanism of Silicon-Rich Silicon Nitride Thin Films
文章编号:
1000-5013(2007)02-0147-04
作者:
曾友华郭亨群
华侨大学信息科学与工程学院; 华侨大学信息科学与工程学院 福建泉州362021; 福建泉州362021
Author(s):
ZENG You-hua GUO Heng-qun
College of Information Science and Engineering, Huaqiao University, Quanzhou 362021, China
关键词:
纳米硅 氮化硅薄膜 光致发光 发光机制
Keywords:
nanoscale silicon particles siticon nitride thin films photoluminescence luminescence mechanism
分类号:
O484.41
DOI:
10.3969/j.issn.1000-5013.2007.02.010
文献标志码:
A
摘要:
对于富纳米硅氮化硅薄膜的光致发光,其电子-空穴对存在3类光激发-光发射过程.通过对富纳米硅氮化硅薄膜光致发光模型的数值模拟对比分析,提出富纳米硅氮化硅薄膜光致发光是量子限制模型和能隙态模型发光机制共同作用的结果.利用得到的结论,讨论一些已报道的富纳米硅氮化硅薄膜光致发光实验结果.
Abstract:
There are three types of photoexcitation-photoemission processes for electron-holes in the photoluminescence from silicon-rich silicon nitride thin films.In this paper,based on the comparative analysis of the numerical simulation of photoluminescence mechanism models for siliconrich silicon nitride thin films,we suggest that photoluminescence of silicon-rich silicon nitride thin films is a result of the quantum confinement model photoluminescence mechanism and the energy gap states model photoluminescence mechanism operating together,and use the obtained conclusion we discuss some photoluminescence experimental results reported about silicon-rich silicon nitride thin films.

参考文献/References:

[1] CANHAM L T. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers [J]. Applied Physics Letters, 1990.1046-1048.
[2] 彭英才, 何宇亮. 硅基纳米材料发光特性的研究进展 [J]. 量子电子学报, 1999(1):1-7.
[3] 秦国刚. 纳米硅/氧化硅体系光致发光机制 [J]. 红外与毫米波学报, 2005(3):165-173.doi:10.3321/j.issn:1001-9014.2005.03.002.
[4] QIN Guo-gang, LI Yu-jie. Photoluminescence mechanism model for oxidized porous silicon and nanoscale-silicon-particle-embedded silicon oxide [J]. Physical Review, 2003.085309.
[5] LIU Yu-zhen, SHI Wang-guan. Study of photoluminescence spectra of Si-rich SiNx films [J]. Materials Letters, 2004.2397-2400.doi:10.1016/j.matlet.2004.02.015.
[6] 王颖, 申德振, 刘益春. 包埋于氮化硅薄膜中的硅团簇的光致发光特性 [J]. 发光学报, 2004(6):705-709.doi:10.3321/j.issn:1000-7032.2004.06.018.
[7] PEI Z, HWANG H L. Formation of silicon nano-dots in luminescent silicon nitride [J]. Applied Sueface Science, 2003, (212-213):760-764.
[8] 许圣华, 辛煜, 宁兆元. ECR-CVD制备的非晶SiOx Ny 薄膜的光致蓝光发射 [J]. 物理学报, 2003(5):1287-1291.doi:10.3321/j.issn:1000-3290.2003.05.047.
[9] MO Chi-mei, ZHANG Li-de, XIE Lun-yi. Luminescence of nanometer-sized amorphous silicon nitride solids [J]. Journal of Applied Physics, 1993, (10):5185-5188.
[10] 纪爱玲, 马利波, 刘徵. 纳米Si-SiOx 和Si-SiNx 复合薄膜的低温制备及其发光特性 [J]. 物理学报, 2004, (11):3118-3822.doi:10.3321/j.issn:1000-3290.2004.11.036.
[11] ARNETT P C, YUN B H. Silicon nitride trap properties as revealed by charge-centroid measurements on MNOS devices [J]. Applied Physics Letters, 1975(3):94-96.doi:10.1063/1.88093.
[12] WANG Y Q, WANG Y G, CAO L. High-efficiency visible photoluminescence from amorphous silicon nanoparticles embedded in silicon nitride [J]. Applied Physics Letters, 2003, (17):3474-3476.
[13] KIM Baek-hyun, CHO Charg-hee, KIM Tae-wook. Photoluminescence of quantum dots in silicon nitride grown by NH3 and SiH4 [J]. Applied Physics Letters, 2005(3):091908-091910.
[14] 董立军, 刘渝珍, 陈大鹏. 富硅氮化硅薄膜的荧光发射 [J]. 发光学报, 2005(3):380-384.doi:10.3321/j.issn:1000-7032.2005.03.019.
[15] 王小波, 刘渝珍, 奎热西. SiH2Cl2-NH3配比对α-SiNx:H薄膜PL峰的影响 [J]. 发光学报, 2005(4):502-505.doi:10.3321/j.issn:1000-7032.2005.04.017.

备注/Memo

备注/Memo:
国家自然科学基金重点资助项目(60336010,60678053)
更新日期/Last Update: 2014-03-23